@article{252086, author = {Albert Davydov and Jian Shi and Alexander Kvit and Sergiy Krylyuk and Xudong Wang}, title = {Electron Microscopy Observation of TiO2 Nanocrystal Evolution in High-Temperature Atomic Layer Deposition}, year = {2013}, number = {13}, month = {2013-10-04}, publisher = {Nano Letters}, language = {en}, }