@article{252581, author = {Daniel Josell and Thomas Moffat}, title = {Superfilling Damascene Trenches with Gold in Sulfite Electrolyte}, year = {2013}, month = {2013-04-24}, publisher = {Journal of the Electrochemical Society}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913429}, language = {en}, }