@article{35656,
  author = {Adam Steele and Brenton Knuffman and Jabez McClelland and Jon Orloff},
  title = {A Focused Chromium Ion Beam},
  year = {2010},
  number = {28},
  month = {2010-10-21},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906025},
  language = {en},
}