@book{48736,
  author = {David Seiler and Alain Diebold and Robert McDonald and Caroline Ayre and Rajinder Khosla and Stefan Zollner and Erik Secula},
  title = {Characterization and Metrology for ULSI Technology: 2005},
  year = {2005},
  number = {788},
  month = {2005-09-28},
  publisher = {American Institute of Physics, Melville, NY},
  language = {en},
}