@article{62651,
  author = {Savelas Rabb and Michael Winchester and Lee Yu},
  title = {Accurate Determinations of Ge Atom Fractions in SiGe Semiconductor Chips Using High Performance ICP-OES},
  year = {2008},
  number = {23},
  month = {2008-01-04},
  publisher = {Journal of Analytical Atomic Spectrometry},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=832181},
  language = {en},
}