@article{67861,
  author = {Richard Lindstrom and David Simons and R Bennett and R. Benbalagh and Bruce MacDonald and A. Chew and D. Gehre and H Hasegawa and C. Hitzman and J. Ko and C Magee and N. Montgomery and P. Peres and P. Ronsheim and S. Yoshikawa and M. Schuhmacher and W. Stockwell and D. Sykes and M. Tomita and F. Toujou and J. Won},
  title = {Round-Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS},
  year = {2006},
  number = {252},
  month = {2006-11-01},
  publisher = {Applied Surface Science},
  language = {en},
}