@conference{69846,
  author = {K. Jones and K. Moller and M. Puga-Lambers and M. Law and David Simons and P Chi and B. Freer and J. Bernstein and L. Rubin and R. Simonton and R. Elliman and M. Petravic and P. Kringhoj},
  title = {The Effect of End of Range Loops on Transient Enhanced Diffusion in Si},
  year = {1997},
  month = {1997-04-01},
  publisher = {Proceedings of the 11th International Conference Ion Implantation Technology, Austin, TX},
  language = {en},
}