@conference{753881,
  author = {P. Durgapal and James Ehrstein and Nhan Nguyen},
  title = {Thin-Film Ellipsometry Metrology},
  year = {1998},
  month = {1998-03-01 00:03:00},
  publisher = {Proc.,  1998 Conference, Gaithersburg, MD, USA},
  language = {en},
}