@conference{754051,
  author = {J Park and J. Lee and D. Venables and S. Krause and Peter Roitman},
  title = {Role of Oxygen Precipitation Processes in Defect Formation and Evolution in Oxygen Implanted Silicon-on-Insulator},
  year = {1993},
  number = {279},
  month = {1993-12-31 00:12:00},
  publisher = {Proc.,  Materials Research Society Symposium, Materials Synthesis and Processing Using Ion Beams, Boston, MA, USA},
  language = {en},
}