@conference{754066,
  author = {S. Bagchi and J. Lee and S. Krause and Peter Roitman},
  title = {Defect Formation Mechanisms in Low Dose SIMOX Material},
  year = {1996},
  number = {96-3},
  month = {1996-12-31 00:12:00},
  publisher = {Proc., Electrochemical Society International Symposium on SOI Technology and Devices, Los Angeles, CA, USA},
  language = {en},
}