@conference{754086,
  author = {M. Buehler and Loren Linholm and V. Tyree and Richard Allen and B. Blaes and K. Hicks and G. Jennings},
  title = {CMOS Process Monitor},
  year = {1988},
  month = {1988-12-31 00:12:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Long Beach, CA, USA},
  language = {en},
}