@conference{754121,
  author = {T Kelly and T Gribb and R Martens and D Larson and N Tabat and R Matyi and Thomas Shaffner},
  title = {Local Electrode Atom Probes: Prospects for 3D Atomic-Scale Metrology Applications in the Semiconductor and Data Storage Industries},
  year = {2001},
  month = {2001-02-01 00:02:00},
  publisher = {Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA},
  language = {en},
}