@conference{757716,
  author = {Richard Allen and Michael Cresswell and William Guthrie and Loren Linholm and H Bogardus and J Martinez de pinillos and B Am ende and Christine Murabito and M Bennett},
  title = {CD Reference Materials for Sub-Tenth Micrometer Applications},
  year = {2002},
  month = {2002-03-01 00:03:00},
  publisher = {International Society for Optical Engineering (SPIE) Microlithology Symposium, March 3-8, 1},
  language = {en},
}