@article{758231,
  author = {Sophie Djordjevic and J Roberts and James Olthoff},
  title = {Spatial and Time Characteristics of Low Temperature RF Plasmas for Materials Processing},
  year = {1996},
  number = {7},
  month = {1996-01-01 00:01:00},
  publisher = {Journal of Magnetohydrodynamics and Plasma Research},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32421},
  language = {en},
}