@conference{759526,
  author = {Richard Allen and Michael Cresswell and Christine Murabito and Ronald Dixson and E. Bogardus},
  title = {Critical Dimension Calibration Standards for ULSI Metrology},
  year = {2003},
  month = {2003-09-30 00:09:00},
  publisher = {Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31314},
  language = {en},
}