@article{760061,
  author = {Bogdan Lita and O Pluchery and R Opila and Y Chabal and G. Bunea and J Holman and E Bekos},
  title = {Wet chemical cleaning of plasma oxide grown on heated (001) InP surfaces},
  year = {2004},
  number = {22},
  month = {2004-08-01 00:08:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}