@conference{762471,
  author = {Richard Allen and Eric Vogel and Loren Linholm and Michael Cresswell},
  title = {Sheet and Line Resistance of Patterned SOI Surface Film CD Reference Materials as a Function of Substrate Bias},
  year = {1999},
  month = {1999-04-01 00:04:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Goteborg, 1, SW},
  language = {en},
}