@conference{762836,
  author = {Curt Richter and Nhan Nguyen and G Alers and X Guo and Xiaorui Wang and T Ma and T Tamagawa},
  title = {Analytical Spectroscopic Ellipsometry of Ta<sub>2</sub>O<sub>5</sub> and TiO<sub>2</sub> for Use as High-k Gate Dielectrics},
  year = {1999},
  month = {1999-12-02 00:12:00},
  publisher = {Workbook of the 30th IEEE Semiconductor Interface Specialist Conference, Charleston, SC, USA},
  language = {en},
}