@conference{762961,
  author = {Shao Yang and Darryl Keenan and Holger Laabs and Marla Dowell},
  title = {A 193 nm Detector Nonlinearity Measurement System at NIST},
  year = {2003},
  number = {5040},
  month = {2003-01-01 00:01:00},
  publisher = {Proc., 2003 SPIE Optical Microlithography Conf., Santa Clara, CA, USA},
  language = {en},
}