@conference{763166,
  author = {Richard Allen and Loren Linholm and Michael Cresswell and Colleen Hood},
  title = {A Novel Method for Fabricating CD Reference Materials with 100 nm Linewidths},
  year = {2000},
  month = {2000-12-31 00:12:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA},
  language = {en},
}