@conference{763546,
  author = {Curt Richter and Nhan Nguyen and Evgeni Gusev and T Zabel and G Alers},
  title = {Optical and Electrical Thickness Measurements of Alternate Gate Dielectrics: a Fundamental Difference},
  year = {2001},
  month = {2001-02-01 00:02:00},
  publisher = {Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA},
  language = {en},
}