@conference{763636,
  author = {Richard Allen and Michael Cresswell and Loren Linholm},
  title = {Junction-Isolated Electrical Test Structures for Critical Dimension Calibration Standards},
  year = {2003},
  month = {2003-03-31 00:03:00},
  publisher = {2003 ICMTS IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA},
  language = {en},
}