@misc{763836, author = {James Ehrstein and C Croarkin}, title = {Standard Reference Materials: The Certification of 100 mm Diameter Silicon Resistivity SRMs 2541 through 2547 Using Dual-Configuration Four-Point Probe Measurements}, year = {1999}, number = {260}, month = {1999-06-01 00:06:00}, publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD}, language = {en}, }