@conference{765436,
  author = {Marla Dowell and Christopher Cromer and Rodney Leonhardt and Thomas Scott},
  title = {Deep Ultraviolet Laser Metrology for Semiconductor Photolithography},
  year = {1998},
  number = {449},
  month = {1998-11-01 00:11:00},
  publisher = {Proc., 1998 Intl. Conf. on Characterization and Metrology for ULSI Tech., Gaithersburg, MD},
  language = {en},
}