@conference{765461,
  author = {M. Doss and Deane Chandler-Horowitz and Jay Marchiando and S. Krause and S. Seraphin},
  title = {Analysis for the Characterization of Oxygen Implanted Silicon (SIMOX) by Spectroscopic Ellipsometry},
  year = {1991},
  number = {209},
  month = {1991-12-31 00:12:00},
  publisher = {Proc., Materials Research Society Symposium, Boston, MA, USA},
  language = {en},
}