@article{765516, author = {Janet Cassard and M. Parameswaran and Mona Zaghloul and Michael Gaitan}, title = {High-Level CAD Melds Micromachined Devices with Foundries}, year = {1992}, number = {8}, month = {1992-11-01 00:11:00}, publisher = {IEEE Circuits & Devices}, language = {en}, }