@conference{765581,
  author = {H. Huff and Curt Richter and M. Green and G. Lucovsky and T. Hattori},
  title = {Ultrathin SiO<sub>2</sub> and High-K Materials for ULSI Gate Dielectrics},
  year = {1999},
  month = {1999-09-01 00:09:00},
  publisher = {Proc., Mater. Res. Soc. Symp. , Pittsburgh, PA, USA},
  language = {en},
}