@article{765626,
  author = {Richard Cavicchi and John Suehle and Kenneth Kreider and B. Shomaker and John Small and Michael Gaitan and P Chaparala},
  title = {Growth of SnO<sub>2</sub> Films on Micromachined Hotplates},
  year = {1995},
  number = {66},
  month = {1995-02-13 00:02:00},
  publisher = {Applied Physics Letters},
  language = {en},
}