@misc{765766, author = {Janet Cassard and Michael Cresswell and Colleen Hood and Loren Linholm and Peter Roitman}, title = {The Test Guide for CMOS-on-SIMOX Test Chips NIST3 and NIST4}, year = {1993}, number = {4890}, month = {1993-01-01 00:01:00}, publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD}, language = {en}, }