@conference{766016,
  author = {P. McMarr and B. Mrstik and M. Twigg and H. Hughes and M. Anc and Peter Roitman and G. Garcia},
  title = {Optimization of the Electrical Properties of Low-Dose SIMOX Wafers},
  year = {1997},
  month = {1997-12-31 00:12:00},
  publisher = {Proc.,  1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA},
  language = {en},
}