@misc{766136,
  author = {Barbara Belzer and K Eberhardt and Deane Chandler-Horowitz and James Ehrstein and P. Durgapal},
  title = {Semiconductor Measurement Techonology: CN-1364 NIST/ VLSI Thin Film Standards: Final Report},
  year = {1998},
  number = {400},
  month = {1998-04-01 00:04:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}