@conference{766151,
  author = {Harry Schafft and John Suehle and P. Mirel},
  title = {Thermal Conductivity Measurements of Thin-Film Silicon Dioxide},
  year = {1989},
  month = {1989-12-31 00:12:00},
  publisher = {Proc. ICMTS 1989, Intl. Conf. on Microelectronic Test Structures, Edinburgh, 1, UK},
  language = {en},
}