@conference{766241,
  author = {C. Jacobs and A. Genis and L. Allen and Peter Roitman},
  title = {Effect of Anneal Temperature on Si/Buried Oxide Interface Roughness of SIMOX},
  year = {1994},
  month = {1994-12-31 00:12:00},
  publisher = {Proc.,  1994 IEEE SOI Conference, Nantucket, MA, USA},
  language = {en},
}