@article{766781,
  author = {S Witczak and Michael Gaitan and John Suehle and M. Peckerar and M Ma},
  title = {The Interaction of Stoichiometry, Mechanical Stress and Interface Trap Density in LPCVD Si-Rich SiNx-Si Structures},
  year = {1994},
  number = {37},
  month = {1994-12-31 00:12:00},
  publisher = {Solid-State Electronics},
  language = {en},
}