@conference{767021, author = {W. Thurber and J Lowney and Robert Larrabee and P. Talwar and James Ehrstein}, title = {An ac Impedance Method for High-Resistivity Measurements of Silicon}, year = {1989}, month = {1989-12-31 00:12:00}, publisher = {Extended Abstracts of the Electrochemical Society, Los Angeles, CA, USA}, language = {en}, }