@conference{767341,
  author = {M. Jones and John Roberts and Colleen Hood and Michael Cresswell and Richard Allen},
  title = {Test Chip for the Evaluation of Surface Diffusion Phenomena in Sputtered Aluminum Planarization Processes},
  year = {1991},
  number = {4},
  month = {1991-12-31 00:12:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Kyoto, 1, JA},
  language = {en},
}