@article{767386,
  author = {J. Lee and J Park and D. Venables and S. Krause and Peter Roitman},
  title = {Stacking Fault Pyramid Formation and Energetics in Silicon-on-Insulator Material Formed by Cycles of Oxygen Implantation and Annealing},
  year = {1993},
  number = {63},
  month = {1993-12-01 00:12:00},
  publisher = {Applied Physics Letters},
  language = {en},
}