@conference{767746,
  author = {Richard Allen and Janet Cassard},
  title = {Critical Dimension Metrology for MEMS Processes Using Electrical Techniques},
  year = {1996},
  month = {1996-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II 2880, Undefined},
  language = {en},
}