@article{767751,
  author = {G. DeSalvo and W. Tseng and J. Comas},
  title = {Etch Rates and Selectivities of Citric Acid/Hydrogen Peroxide on GaAs, A1<sub> 0.3</sub>Ga<sub> 0.7</sub>As, In<sub> 0.2</sub>Ga<sub> 0.8</sub>As, in<sub> 0.53</sub>Ga<sub> 0.47</sub>As, In<sub> 0.52</sub>A1<sub> 0.48</sub>As, and InP},
  year = {1992},
  number = {139},
  month = {1992-03-01 00:03:00},
  publisher = {Journal of the Electrochemical Society},
  language = {en},
}