@misc{767776,
  author = {Janet Cassard and M. Parameswaran and Mona Zaghloul and Michael Gaitan},
  title = {Methodology for the Computer-Aided Design of Silicon Micromachined Devices in a Standard CMOS Process},
  year = {1992},
  number = {4865},
  month = {1992-05-01 00:05:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}