@conference{767901,
  author = {Jay Marchiando and Joseph Kopanski and John Albers},
  title = {Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements},
  year = {1999},
  month = {1999-06-01 00:06:00},
  publisher = {Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors,  Research Triangle Park, NC, USA},
  language = {en},
}