@conference{768261,
  author = {Loucas Christophorou and James Olthoff},
  title = {Electron Interactions With Plasma Processing Gases: CF<sub>4</sub>, CHF<sub>3</sub>, C<sub>2</sub>F<sub>6</sub>, and C<sub>3</sub>F<sub>8</sub>},
  year = {1998},
  month = {1998-01-01 00:01:00},
  publisher = {Conf. Proc. Symposium on Atomic and Surface Physics and Related Topics, Going, 1, AU},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16418},
  language = {en},
}