@misc{768396,
  author = {C. Vezzetti and R. Varner and James Potzick},
  title = {Standard Reference Materials: Antireflecting-Chromium Linewidth Standard, SRM 475, for Calibration of Optical Microscope Linewidth Measuring Systems},
  year = {1992},
  number = {260},
  month = {1992-01-01 00:01:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}