@conference{769116,
  author = {Todd Harvey and Kristine Bertness and Chih-Ming Wang and Jolene Splett},
  title = {Accuracy of AlGaAs Rates and Composition Determination Using RHEED Oscillations},
  year = {2002},
  month = {2002-09-01 00:09:00},
  publisher = {Proc., MBE XII - Int'l. Conf. on Molecular Beam Epitaxy, San Francisco, CA, USA},
  language = {en},
}