@misc{770086,
  author = {W Bullis},
  title = {Semiconductor Measurement Technology: Evolution of Silicon Materials Characterization: Lessons Learned for Improved Manufacturing},
  year = {1993},
  number = {400},
  month = {1993-07-01 00:07:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}