@misc{771896,
  author = {J Ramirez-hernandez and H Li and E Fernandez and Charles McLean and Swee Leong},
  title = {A Framework for Standard Modular Simulation: Application to Semiconductor Wafer Fabrication},
  year = {2005},
  month = {2005-06-01 00:06:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822299},
  doi = {https://doi.org/10.6028/NIST.IR.7236},
  language = {en},
}