@article{773526,
  author = {Jay Marchiando and Joseph Kopanski},
  title = {On calculating scanning capacitance microscopy data for a dopant profile in semiconductors},
  year = {2004},
  number = {22},
  month = {2004-02-01 00:02:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}