@article{776101,
  author = {R Kumon and Donna Hurley},
  title = {Effects of residual stress on the thin-film elastic moduli calculated from surface acoustic wave spectroscopy experiments},
  year = {2005},
  month = {2005-02-23 00:02:00},
  publisher = {Thin Solid Films},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50166},
  language = {en},
}