@conference{776231,
  author = {Janet Cassard and David Read and Michael Gaitan},
  title = {Analysis of Fixed-Fixed Beam Test Structures},
  year = {1996},
  number = {2880},
  month = {1996-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE) The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II, Austin, TX, USA},
  language = {en},
}