@conference{776561, author = {P Chi and David Simons and Peter Roitman}, title = {Artifacts Observed in Oxygen Profiles of SIMOX Samples by Secondary Ion Mass Spectrometry}, year = {1988}, month = {1988-12-31 00:12:00}, publisher = {Microbeam Analysis - l988, Proc. 22nd Annual Conf. Materials Analysis Society, Milwaukee, WI, USA}, language = {en}, }